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The following are recent PhD theses produced
by members of the CODP group. They may be downloaded in PDF format.
You can obtain the Acrobat Reader for PDF files from
.
Yang
Yang, PhD Thesis, March 2010
"MODELING DISCHARGE AND SURFACE PROCESSES IN CAPACITIVELY COUPLED REACTORS"
[copyright Y. Yang 2010](25 MB)
Ankur
Agarwal, PhD Thesis, December 2007
"CONTROLLING ACTIVATION ENERGY TO WAFERS AND WALLS IN PLASMA
PROCESSING REACTORS FOR MICROELECTRONICS FABRICATION"
[copyright A. Agarwal 2007](7.8 MB)
Ramesh
Arakoni, PhD Thesis, September 2007
"SIMULATION OF FLOWING PLASMA DISCHARGES WITH APPLICATIONS TO LASERS,
FUEL CELLS, AND MICROTHRUSTERS"
[copyright R. Arakoni 2007](17.8 MB)
Ananth
Bhoj, PhD Thesis, December 2006
"MULTISCALE SIMULATION OF ATMOSPHERIC PRESSURE PULSED DISCHARGES USED IN
POLYMER SURFACE FUNCTIONALIZATION"
[copyright A. Bhoj 2006](10.4 MB)
Kapil
Rajaraman, PhD Thesis, September 2005
"RADIATION TRANSPORT IN LOW PRESSURE PLASMAS: LIGHTING AND SEMICONDUCTOR
ETCHING PLASMAS"
[copyright K. Rajaraman 2005](5.2 MB)
Vivek
Vyas, PhD Thesis, April 2005
"TRANSPORT IN LOW PRESSURE PLASMA REACTORS FOR MATERIALS PROCESSING"
[copyright V. Vyas 2005](9.8 MB)
Arvind
Sankaran, PhD Thesis, December 2003
"SURFACE REACTION MECHANISMS FOR PLASMA PROCESSING OF SEMICONDUCTORS"
[copyright A. Sankaran 2003](7.7 MB)
Pramod
Subramonium, PhD Thesis, September 2003
"SIMULATION OF TRANSIENTS AND TRANSPORT IN PLASMA PROCESSING REACTORS"
[copyright P. Subramonium 2003](3.2 MB)
Rajesh
Dorai, PhD Thesis, December 2002.
"MODELING OF ATMOSPHERIC PRESSURE PLASMA PROCESSING
OF GASES AND SURFACES"
[copyright R. Dorai 2002](4.0 MB)
Ronald
Kinder, PhD Thesis, June 2001.
"MODELING OF WAVE HEATED DISCHARGES USED IN PLASMA
PROCESSING REACTORS"
[copyright R. Kinder 2001](4.2 MB)
Junqing
Lu, PhD Thesis, April 2001.
"MODELING PLASMA EQUIPMENT AND FEATURE PROFILE IN
IONIZED METAL PHYSICAL VAPOR DEPOSITION"
[copyright J. Lu 2001](3.5 MB)
Da
Zhang, PhD Thesis, September 2000.
"SURFACE REACTION MECHANISMS IN PLASMA ETCHING PROCESSES"
[copyright D. Zhang, 2000](1.1 MB)
XUDONG
XU, PhD Thesis, October 1999.
"DYNAMICS OF HIGH- AND LOW-PRESSURE PLASMA REMEDIATION"
[copyright X. Xu, 1999](1.6 MB)
ROBERT J.
HOEKSTRA, PhD Thesis, September 1998.
"A MODEL OF ENERGY AND ANGULAR DISTRIBUTIONS OF FLUXES TO THE SUBSTRATE AND
RESULTING SURFACE TOPOLOGY FOR PLASMA ETCHING SYSTEMS"
[copyright R. J. Hoekstra, 1998](2.9 MB)
MICHAEL J.
GRAPPERHAUS, PhD Thesis, January 1998.
"MULTISCALE TRANSPORT PHENOMENA IN LOW-PRESSURE PLASMAS"
[copyright M. J. Grapperhaus, 1998]
(1.7 MB)
FRED Y.
HUANG, PhD Thesis, June 1997.
"TRANSPORT AND AGGLOMERATION OF DUST CONTAMINANT PARTICLES IN
REACTIVE ION ETCH REACTORS"
[copyright F. Y. Huang, 1997]
(1.9 MB)
HELEN H.
HWANG, PhD Thesis, January 1997.
"PARTICLES IN PLASMA PROCESSING REACTORS: MODELING NUCLEATION, TRANSPORT,
AND INTERPARTICLE EFFECTS TO REDUCE WAFER CONTAMINATION"
[copyright H. H. Hwang, 1997]
(3.8 MB)
ANN C.
GENTILE, PhD Thesis, March 1995.
"KINETIC PROCESSES AND PLASMA REMEDIATION OF TOXIC GASES"
[copyright A. C. Gentile, 1995]
(730 kB)
28 February 2010
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