Theses: MS, PhD
The following are recent MS theses produced by members of the CODP group. They may be downloaded in PDF format. To download the thesis click on the highlighted text below the title.
PhD Theses
- Kseniia Konina, PhD Thesis, May 2024 "ATMOSPHERIC PRESSURE PLASMA TREATMENT OF COMPLEX INTERFACES" [copyright K. Konina] (19 MB)
- Jordyn Polito, PhD Thesis, May 2024 "REACTION MECHANISMS FOR LOW TEMPERATURE PLASMA INTERACTIONS WITH COMPLEX SURFACES AND MOLECULES" [copyright J. Polito] (5 MB)
- Florian Krüger, PhD Thesis, March 2024 "MODELING AND OPTIMIZATION OF HIGH ASPECT RATIO PLASMA ETCHING" [copyright F. Krüger] (10 MB)
- Mackenzie Meyer, PhD Thesis, August 2022 "INVESTIGATING PLASMA INTERACTIONS WITH MULTIPHASE SURFACES USING COMPUTATIONAL MODELS" [copyright M. Meyer] (10 MB)
- Steven Lanham, PhD Thesis, May 2022 "MODELING PULSED POWER PLASMAS AND APPLICATIONS TO IN-SITU NANOPARTICLE GROWTH" [copyright S. Lanham] (14 MB)
- Juliusz Kruszelnicki, PhD Thesis, May 2021 "CONTROLLING PLASMA REACTIVITY TRANSFER TO GASES, SOLIDS AND LIQUIDS" [copyright J. Kruszelnicki 2021] (14 MB)
- Chenhui Qu, PhD Thesis, November 2020 "COMPUTATIONAL INVESTIGATIONS OF FUNDAMENTAL PLASMA PROCESSES IN SEMICONDUCTOR INDUSTRIAL APPLICATIONS" [copyright C. Qu 2020] (21 MB)
- Amanda Lietz, PhD Thesis, September 2019 "ATMOSPHERIC PRESSURE PLASMA SOURCES FOR PLASMA MEDICINE" [copyright A. Lietz 2019] (22 MB)
- Shuo Huang, PhD Thesis, July 2019 "MODELING OF DOWNSTREAM AND DIRECT PLASMA SYSTEMS FOR HIGHLY SELECTIVE AND ANISOTROPIC ETCHING" [copyright S. Huang 2019] (15 MB)
- Chad M. Huard, PhD Thesis, June 2018 "NANO-SCALE FEATURE PROFILE MODELING OF PLASMA MATERIAL PROCESSING" [copyright C. M. Huard 2018] (11 MB)
- Peng Tian, PhD Thesis, January 2018 "CONTROLLING PHOTON AND ION FLUXES IN LOW PRESSURE LOW TEMPERATURE PLASMAS" [copyright P. Tian 2018] (16 MB)
- Wei Tian, PhD Thesis, August 2015 "MODELLING INTERACTIONS OF ATMOSPHERIC PRESSURE PLASMAS WITH LIQUIDS" [copyright W. Tian 2015] (10 MB)
- Seth A. Norberg, PhD Thesis, May 2015 "MODELING ATMOSPHERIC PRESSURE PLASMA JETS: PLASMA DYNAMICS, INTERACTION WITH DIELECTRIC SURFACES, LIQUID LAYERS AND CELLS" [copyright S. A. Norberg 2015] (32 MB)
- Yiting Zhang, PhD Thesis, May 2015 "LOW TEMPERATURE PLASMA ETCHING CONTROL THROUGH ION ENERGY ANGULAR DISTRIBUTION AND 3-DIMENSIONAL PROFILE SIMULATION" [copyright Y. Zhang 2015] (15.5 MB)
- Michael D. Logue, PhD Thesis, July 2014 "CONTROL OF ELECTRON AND ION ENERGY DISTRIBUTIONS IN INDUCTIVELY COUPLED PLASMAS USING PULSED POWER AND DC BIASES FOR FABRICATION OF MICROELECTRONICS" [copyright M. D. Logue 2014] (9.3 MB)
- Jun-Chieh Wang, PhD Thesis, June 2014 "MODELING STUDIES OF ATMOSPHERIC PRESSURE MICROPLASMAS: PLASMA DYNAMICS, SURFACE INTERACTION AND APPLICATIONS" [copyright J.-C. Wang 2014] (18.5 MB)
- Sang-Heon Song, PhD Thesis, June 2014 "CONTROL OF PLASMA KINETICS FOR MICROELECTRONICS FABRICATION" [copyright S.-H. Song 2014] (12.8 MB)
- Juline Shoeb, PhD Thesis, February 2012 "PLASMA SURFACE INTERACTIONS IN NANOSCALE PROCESSING: PRESERVATION OF LOW-K INTEGRITY AND HIGH-K GATE-STACK ETCHING WITH Si SELECTIVITY" [copyright J. Shoeb 2012] (6 MB)
- Mingmei Wang, PhD Thesis, June 2011 "MODELING OF COMPLEX SURFACE INTERACTIONS IN LOW AND HIGH PRESSURE PLASMAS" [copyright M. Wang 2011] (7 MB)
- Yang Yang, PhD Thesis, March 2010 "MODELING DISCHARGE AND SURFACE PROCESSES IN CAPACITIVELY COUPLED REACTORS" [copyright Y. Yang 2010] (25 MB)
- Ankur Agarwal, PhD Thesis, December 2007 "CONTROLLING ACTIVATION ENERGY TO WAFERS AND WALLS IN PLASMA PROCESSING REACTORS FOR MICROELECTRONICS FABRICATION" [copyright A. Agarwal 2007] (7.8 MB)
- Ramesh Arakoni, PhD Thesis, September 2007 "SIMULATION OF FLOWING PLASMA DISCHARGES WITH APPLICATIONS TO LASERS, FUEL CELLS, AND MICROTHRUSTERS" [copyright R. Arakoni 2007] (17.8 MB)
- Ananth Bhoj, PhD Thesis, December 2006 "MULTISCALE SIMULATION OF ATMOSPHERIC PRESSURE PULSED DISCHARGES USED IN POLYMER SURFACE FUNCTIONALIZATION" [copyright A. Bhoj 2006] (10.4 MB)
- Kapil Rajaraman, PhD Thesis, September 2005 "RADIATION TRANSPORT IN LOW PRESSURE PLASMAS: LIGHTING AND SEMICONDUCTOR ETCHING PLASMAS" [copyright K. Rajaraman 2005]( 5.2 MB)
- Vivek Vyas, PhD Thesis, April 2005 "TRANSPORT IN LOW PRESSURE PLASMA REACTORS FOR MATERIALS PROCESSING" [copyright V. Vyas 2005] (9.8 MB)
- Arvind Sankaran, PhD Thesis, December 2003 "SURFACE REACTION MECHANISMS FOR PLASMA PROCESSING OF SEMICONDUCTORS" [copyright A. Sankaran 2003] (7.7 MB)
- Pramod Subramonium, PhD Thesis, September 2003 "SIMULATION OF TRANSIENTS AND TRANSPORT IN PLASMA PROCESSING REACTORS" [copyright P. Subramonium 2003] (3.2 MB)
- Rajesh Dorai, PhD Thesis, December 2002 "MODELING OF ATMOSPHERIC PRESSURE PLASMA PROCESSING OF GASES AND SURFACES" [copyright R. Dorai 2002]( 4.0 MB)
- Ronald Kinder, PhD Thesis, June 2001 "MODELING OF WAVE HEATED DISCHARGES USED IN PLASMA PROCESSING REACTORS" [copyright R. Kinder 2001] (4.2 MB)
- Junqing Lu, PhD Thesis, April 2001 "MODELING PLASMA EQUIPMENT AND FEATURE PROFILE IN IONIZED METAL PHYSICAL VAPOR DEPOSITION" [copyright J. Lu 2001] (3.5 MB)
- Da Zhang, PhD Thesis, September 2000 "SURFACE REACTION MECHANISMS IN PLASMA ETCHING PROCESSES" [copyright D. Zhang, 2000] (1.1 MB)
- Xudong Xu, PhD Thesis, October 1999 "DYNAMICS OF HIGH- AND LOW-PRESSURE PLASMA REMEDIATION" [copyright X. Xu, 1999] (1.6 MB)
- Robert J. Hoekstra, PhD Thesis, September 1998 "A MODEL OF ENERGY AND ANGULAR DISTRIBUTIONS OF FLUXES TO THE SUBSTRATE AND RESULTING SURFACE TOPOLOGY FOR PLASMA ETCHING SYSTEMS" [copyright R. J. Hoekstra, 1998] (2.9 MB)
- Michael J. Grapperhaus, PhD Thesis, January 1998 "MULTISCALE TRANSPORT PHENOMENA IN LOW-PRESSURE PLASMAS" [copyright M. J. Grapperhaus, 1998] (1.7 MB)
- Fred Y. Huang, PhD Thesis, June 1997 "TRANSPORT AND AGGLOMERATION OF DUST CONTAMINANT PARTICLES IN REACTIVE ION ETCH REACTORS" [copyright F. Y. Huang, 1997] (1.9 MB)
- Helen H. Hwang, PhD Thesis, January 1997 "PARTICLES IN PLASMA PROCESSING REACTORS: MODELING NUCLEATION, TRANSPORT, AND INTERPARTICLE EFFECTS TO REDUCE WAFER CONTAMINATION" [copyright H. H. Hwang, 1997] (3.8 MB)
- Ann C. Gentile, PhD Thesis, March 1995 "KINETIC PROCESSES AND PLASMA REMEDIATION OF TOXIC GASES" [copyright A. C. Gentile, 1995] (730 kB)
- Phillip J. Stout, PhD Thesis, 1995 "MODELING OPTICALLY ACTIVATED HIGH POWER SEMICONDUCTOR SWITCHES" [copyright P. J. Stout, 1995] (34.0 MB)
- Jong Won Shon, PhD Thesis, 1994 "MODELING OF HIGH PRESSURE RARE GAS LASERS: KINETICS AND PLASMA CHEMISTRY" [copyright J. W. Shon, 1994] (22.3 MB)
- Seung Jin Choi, PhD Thesis, 1993 "MODELING OF GENERATION AND TRANSPORT OF PARTICLES IN LOW PRESSURE GLOW DISCHARGES AND CONTAMINATION OF WAFERS" [copyright S. J. Choi, 1993] (31.4 MB)
- Michael J. Hartig, PhD Thesis, 1992 "A HYBRID HYDRODYNAMIC-MONTE CARLO SIMULATION OF THE TRANSPORT OF NEUTRAL RADICALS IN LOW PRESSURE REMOTE PLASMA SOURCES" [copyright M. J. Hartig, 1992] (4.8 MB)
- Yilin Weng, PhD Thesis, 1991 "SELF-CONSISTENT MONTE CARLO SIMULATIONS OF PLASMA PROCESSING REACTORS" [copyright Y. Weng, 1991] (19.9 MB)
MS Theses
- Ankur Agarwal, MS Thesis, September 2005 "NON-SINUSOIDAL BIAS WAVEFORMS FOR ACHIEVING HIGH ETCH SELECTIVITY" [copyright A. Agarwal 2005] (1.2 MB)
- D. Shane Stafford, MS Thesis, November 2004 "MODELING OF SINGLET-DELTA OXYGEN YIELDS IN FLOWING ELECTRIC DISCHARGES" [copyright D. S. Stafford 2004] (1.4 MB)
- Ananth Bhoj, MS Thesis, April 2004 "SIMULATION OF THE START UP PHASE OF METAL HALIDE LAMPS" [copyright A. Bhoj 2004](5.5 MB)
- Vivek Vyas, MS Thesis, May 2003 "COULOMB CRYSTALS IN PLASMA PROCESSING REACTORS" [copyright V. Vyas 2003] (1.2 MB)
- Richard Moss, MS Thesis, December 2002 "BREAKDOWN MEASUREMENTS IN ARGON AND XENON APPLICABLE TO METAL HALIDE HIGH INTENSITY DISCHARGE LAMPS" [copyright R. Moss 2002] (6.0 MB)
- Arvind Sankaran, MS Thesis, April 2001 "MODELING OF TIME-DEPENDENT ELECTRON IMPACT SOURCE FUNCTIONS IN INDUCTIVELY COUPLED PLASMAS USING AN "ON-THE-FLY" MONTE-CARLO TECHNIQUE" [copyright A. Sankaran 2001]( 1.2 MB)
- Pramod Subramonium, MS Thesis, October 2000 "TWO-DIMENSIONAL MODELING OF PULSED INDUCTIVELY COUPLED PLASMAS USING MODERATE PARALLELISM" [copyright P. Subramonium, 2000] (1.85 MB)
- Brian M. Lay, MS Thesis, May 2000 "SIMULATION OF METAL HALIDE ELECTRIC DISCHARGE LAMPS USING FINITE VOLUME TECHNIQUES" [copyright B. Lay, 2000] (1.0 MB)
- Rajesh Dorai, MS Thesis, December 1999 "MODELING OF PLASMA REMEDIATION OF NOx USING GLOBAL KINETIC MODELS ACCOUNTING FOR HYDROCARBONS" [copyright R. Dorai, 1999] (744 kB)
- Ron L. Kinder, MS Thesis, September 1998 "CONSEQUENCES OF MODE STRUCTURE ON PLASMA PARAMETERS IN ELECTRON CYCLOTRON RESONACE SOURCES USED FOR MATERIALS PROCESSING" [copyright R. L. Kinder, 1998] (2.3 MB)
- Robert J. Hoekstra, MS Thesis, 1994 "A PLASMA CHEMISTRY MONTE CARLO MODEL FOR ION AND RADICAL FLUXES AND ENERGY DISTRIBUTIONS IN INDUCTIVELY COUPLED PLASMA ETCHING REACTORS" [copyright R. J. Hoekstra, 1994] (1.9 MB)
- Jeanne H. Balbach, MS Thesis, 1991 "MODELING THE REMOVAL OF SULFUR DIOXIDE AND NITROGEN OXIDES FROM FLUE GASES USING COMBINED PLASMA AND OPTICAL PROCESSING" [copyright J. H. Balbach, 1991] (15.5 MB)
- Phillip J. Stout, MS Thesis, 1991 "A MONTE CARLO SIMULATION OF SURFACE KINETICS DURING PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON DIOXIDE USING TETRAETHOXYSILANE CHEMISTRY" [copyright P. J. Stout, 1991] (11.5 MB)
- Hoyoung Pak, MS Thesis, 1988 "A MODEL OF THE BACK LIT THYRATRON" [copyright H. Pak, 1988] (8.7 MB)