Research Support
The members of the Computational Optical and Discharge Physics Group gratefully acknowledge and thank agencies and companies which have supported their research.
Agencies and Companies currently supporting our research:
- Army Research Office
- Department of Energy, Office of Fusion Energy Science
- Lam Research Inc.
- MIPSE (Michigan Institute for Plasma Science and Engineering)
- MKS Inc.
- National Science Foundation
- Samsung Electronics Co., Ltd.
- Taiwan Semiconductor Manufacturing Corp.
- Tokyo Electron, Ltd.
Agencies and Companies who have previously generously supported our research:
- 3M, Inc.
- Agilent, Inc.
- Advanced Energy Consortium
- Air Force Research Labs
- Air Force Office of Scientific Research
- Applied Materials Inc.
- Becton Dickinson Inc.
- CFD Research Corp.
- Defense Advanced Research Projects Agency
- Dupont Inc.
- Ewing Technology Associates
- Ford Motor Company
- HP Research Labs
- Hughes Research Labs
- Intevac, Inc.
- James and Katherine Melsa Professorship Fund
- LG Electronics
- Los Alamos National Laboratory
- Micron Technology, Inc.
- Motorola Inc./Freescale, Inc.
- Novellus Inc.
- Office of Naval Research
- Sandia National Laboratory
- Sematech
- Semiconductor Research Corporation
- Tokyo Electron-Arizona
- Toshiba Inc.
- University of Illinois Research Board
- University of Illinois Founder Professor Fund
- Varian Semiconductor Research Associates